Open AccessSurface Micromachined Piezoelectric Resonant Beam Filters
Author(s) -
B. Piekarski,
Don L. DeVoe,
Madan Dubey,
R. Kaul,
J. R. Conrad,
Robert J. Zeto
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.59
Subject(s) - materials science , lead zirconate titanate , resonator , microelectromechanical systems , optoelectronics , wafer , surface micromachining , piezoelectricity , beam (structure) , torr , silicon , electrode , optics , fabrication , ferroelectricity , composite material , medicine , alternative medicine , physics , pathology , chemistry , dielectric , thermodynamics
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