Open AccessSurface Micromachined Piezoelectric Resonant Beam Filters
Author(s) -
B. Piekarski,
Don L. DeVoe,
Madan Dubey,
Roger Kaul,
J.R. Conrad,
Robert J. Zeto
Publication year - 2000
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.59
Subject(s) - surface micromachining , materials science , piezoelectricity , surface (topology) , beam (structure) , acoustics , optoelectronics , optics , fabrication , physics , composite material , medicine , alternative medicine , geometry , mathematics , pathology