Open AccessNovel Parametric-Effect MEMS Amplifiers/Transducers
Author(s) -
JeanPierre Raskin,
Butrus T. KhuriYakub,
Gabriel M. Rebeiz
Publication year - 2000
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.58
Subject(s) - microelectromechanical systems , parametric statistics , transducer , amplifier , computer science , electronic engineering , materials science , electrical engineering , engineering , optoelectronics , cmos , mathematics , statistics