Open AccessSwitchable Electrostatic Micro-Valves with High Hold-off Pressure
Author(s) -
M. L. Philpott,
David J. Beebe,
Axel Fischer,
Bruce R. Flachsbart,
M. Marshall,
N. Miller,
John C. Selby,
Mark A. Shan,
Yingzhe Wu
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.55
Subject(s) - capacitance , materials science , substrate (aquarium) , silicon , polyimide , microelectromechanical systems , optoelectronics , control valves , composite material , mechanical engineering , layer (electronics) , engineering , electrode , chemistry , oceanography , geology
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