Open AccessSwitchable Electrostatic Micro-Valves with High Hold-off Pressure
Author(s) -
Michael L. Philpott,
David J. Beebe,
Axel Fischer,
Bruce R. Flachsbart,
M. Marshall,
Nate Miller,
John C. Selby,
Mark A. Shan,
Yingzhe Wu
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.55
Subject(s) - materials science