Open AccessElectro-Thermal Actuators Using Optimized Compliant MicroTransmissions as Rectilinear Motion Amplifiers
Author(s) -
L.L. Chu,
Joel Hetrick,
Yogesh B. Gianchandani
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.53
Subject(s) - actuator , displacement (psychology) , fabrication , amplifier , thermal , compliant mechanism , materials science , mechanical engineering , computer science , surface micromachining , electronic engineering , engineering , optoelectronics , structural engineering , physics , cmos , finite element method , artificial intelligence , meteorology , medicine , psychology , alternative medicine , pathology , psychotherapist
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