Open AccessA Multifunctional Silicon-based Microscale Surgical System
Author(s) -
Il-Seok Son,
Amit Lal,
B. Hubbard,
Tyler Olsen
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.50
Subject(s) - materials science , wheatstone bridge , piezoresistive effect , microscale chemistry , ultrasonic sensor , silicon nitride , silicon , optoelectronics , transducer , nanotechnology , microelectromechanical systems , composite material , acoustics , electrical engineering , engineering , resistor , mathematics education , mathematics , physics , voltage
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