Open AccessPost-CMOS Modular Integration of Poly-SiGe Microstructures using Poly-Ge Sacrificial Layers
Author(s) -
Alexander Franke,
Y. Jaio,
Ming-Jhang Wu,
TsuJae King,
Roger T. Howe
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.5
Subject(s) - materials science , microstructure , annealing (glass) , germanium , optoelectronics , wafer , chemical vapor deposition , dopant , substrate (aquarium) , polycrystalline silicon , cmos , fabrication , silicon , composite material , doping , layer (electronics) , medicine , oceanography , alternative medicine , pathology , geology , thin film transistor
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