Open AccessPost-CMOS Modular Integration of Poly-SiGe Microstructures using Poly-Ge Sacrificial Layers
Author(s) -
Alexander Franke,
Y. Jaio,
Ming-Jhang Wu,
TsuJae King,
Roger T. Howe
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.5
Subject(s) - materials science , modular design , cmos , microstructure , optoelectronics , silicon germanium , computer science , silicon , composite material , operating system