Open AccessMicrofabricated Planar Preconcentrator
Author(s) -
Ronald P. Manginell,
Gregory C. Frye-Mason,
Richard Joseph Kottenstette,
P.R. Lewis,
C. Channy Wong
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.43
Subject(s) - wafer , materials science , etching (microfabrication) , fabrication , layer (electronics) , fluidics , optoelectronics , resist , silicon , nanotechnology , reactive ion etching , silicon nitride , electrical engineering , medicine , alternative medicine , engineering , pathology
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