Open AccessPolysilicon Xylophone Bar Magnetometers
Author(s) -
D. K. Wickenden,
John L. Champion,
R. B. Givens,
Thomas J. Kistenmacher,
James L. Lamb,
Robert Osiander
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.36
Subject(s) - magnetometer , miniaturization , bar (unit) , lorentz force , sensitivity (control systems) , acoustics , electrical engineering , magnetic field , orientation (vector space) , dynamic range , electronic engineering , physics , engineering , quantum mechanics , geometry , mathematics , meteorology
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