Open AccessOn-Chip Eddy Current Sensor for Crack Detection in Metals
Author(s) -
Daniel J. Sadler,
Chang Hwan Ahn
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.34
Subject(s) - permalloy , materials science , photoresist , fabrication , eddy current , lithography , optoelectronics , signal (programming language) , inductance , conductor , eddy current sensor , electrical conductor , voltage , electrical engineering , composite material , layer (electronics) , magnetization , magnetic field , physics , computer science , engineering , medicine , alternative medicine , quantum mechanics , pathology , programming language
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