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A MEMS Radio-Frequency Ion Mobility Spectrometer for Chemical Agent Detection
Author(s) -
Raanan A. Miller,
Gary A. Eiceman,
Erkinjon G. Nazarov,
Terence A. King
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.29
Subject(s) - ion mobility spectrometry , spectrometer , mass spectrometry , radio frequency , ion , ionization , electrical mobility , materials science , analytical chemistry (journal) , electric field , chemistry , optoelectronics , optics , physics , telecommunications , computer science , quantum mechanics , organic chemistry , chromatography

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