Open AccessA MEMS Radio-Frequency Ion Mobility Spectrometer for Chemical Agent Detection
Author(s) -
Raanan A. Miller,
Gary A. Eiceman,
Erkinjon G. Nazarov,
Terence A. King
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.29
Subject(s) - ion mobility spectrometry , spectrometer , microelectromechanical systems , radio frequency , ion , materials science , computer science , optoelectronics , telecommunications , physics , optics , quantum mechanics