Open AccessThe Impact of MEMS on the Chemical and Pharmaeutical Industries
Author(s) -
Klavs F. Jensen
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.26
Subject(s) - microelectromechanical systems , chemical industry , computer science , materials science , environmental science , nanotechnology , environmental engineering