Open AccessThe Impact of MEMS on the Chemical and Pharmaeutical Industries
Author(s) -
Klavs F. Jensen
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.26
Subject(s) - microreactor , microfabrication , microelectromechanical systems , microfluidics , chemical process , process engineering , nanotechnology , process (computing) , chemical reaction , heat transfer , process control , materials science , computer science , chemistry , chemical engineering , engineering , medicine , biochemistry , alternative medicine , physics , pathology , fabrication , thermodynamics , operating system , catalysis
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