Open AccessMEMS-Controllable Microlens Array for Beam Steering and Precision Alignment in Optical Interconnect Systems
Author(s) -
Adisorn Tuantrat,
Victor M. Bright,
Jie Zhang,
Wei Zhang,
John A. Neff,
Y.C. Lee
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.25
Subject(s) - microlens , vertical cavity surface emitting laser , materials science , microelectromechanical systems , beam steering , optoelectronics , collimated light , flip chip , optical interconnect , optics , chip , interconnection , laser , beam (structure) , computer science , electrical engineering , engineering , physics , lens (geology) , nanotechnology , computer network , adhesive , layer (electronics)
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