Open AccessA Large-Deflection Electrostatic Actuator for Optical Switching Applications
Author(s) -
J.D. Grade,
H. Jerman,
Thomas W. Kenny
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.24
Subject(s) - actuator , deflection (physics) , optical switch , finite element method , fabrication , materials science , comb drive , deflection angle , instability , optics , engineering , structural engineering , optoelectronics , physics , electrical engineering , mechanics , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom