Open AccessA Large-Deflection Electrostatic Actuator for Optical Switching Applications
Author(s) -
J.D. Grade,
H. Jerman,
Thomas W. Kenny
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.24
Subject(s) - actuator , optical switch , deflection (physics) , computer science , materials science , optoelectronics , optics , physics , artificial intelligence