
Development of a Silicon Two-Axis Micromirror for an Optical Cross-Connect
Author(s) -
A.S. Dewa,
J.W. Orcutt,
M. V. Hudson,
D. Krozier,
A. Richards,
Herzel Laor
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.23
Subject(s) - silicon , optics , optoelectronics , optical switch , materials science , physics , computer science