Open AccessMulti-Degree of Freedom Dynamic Characterization of Deep-Etched Silicon Suspensions
Author(s) -
David A. Horsley,
P.G. Hartwell,
R.G. Walmsley,
Josef Brandt,
Ung Chan Yoon,
S. Hoen
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.20
Subject(s) - aspect ratio (aeronautics) , deep reactive ion etching , materials science , stiffness , etching (microfabrication) , silicon , fabrication , suspension (topology) , displacement (psychology) , plane (geometry) , composite material , optics , optoelectronics , reactive ion etching , geometry , physics , mathematics , layer (electronics) , medicine , psychology , alternative medicine , pathology , homotopy , pure mathematics , psychotherapist
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