Open AccessMulti-Degree of Freedom Dynamic Characterization of Deep-Etched Silicon Suspensions
Author(s) -
David A. Horsley,
P.G. Hartwell,
R.G. Walmsley,
Josef Brandt,
Ung Chan Yoon,
S. Hoen
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.20
Subject(s) - characterization (materials science) , silicon , materials science , degree (music) , etching (microfabrication) , optoelectronics , nanotechnology , physics , acoustics , layer (electronics)