Open AccessA High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump
Author(s) -
H.Q. Li,
David Roberts,
Jacques Steyn,
Kevin T. Turner,
Jorge A. Carretero,
Onnik Yaglioglu,
Yufeng Su,
Laxman Saggere,
Nesbitt W. Hagood,
L. Spearing,
Richard Mlcak,
Kenneth S. Breuer,
Martin Schmidt
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.17
Subject(s) - micropump , microelectromechanical systems , flow (mathematics) , materials science , volumetric flow rate , computer science , acoustics , electronic engineering , mechanics , optoelectronics , engineering , physics , nanotechnology