Open AccessA High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump
Author(s) -
H.Q. Li,
David C. Roberts,
Jacques Steyn,
Kevin T. Turner,
Jorge A. Carretero,
Onnik Yaglioglu,
Yufeng Su,
Laxman Saggere,
Nesbitt W. Hagood,
L. Spearing,
Richard Mlcak,
Kenneth Breuer,
Martin A. Schmidt
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.17
Subject(s) - materials science , micropump , microelectromechanical systems , microfabrication , piezoelectricity , anodic bonding , fabrication , silicon on insulator , wafer bonding , microsystem , silicon , eutectic bonding , eutectic system , optoelectronics , composite material , nanotechnology , medicine , alternative medicine , alloy , pathology
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