Open AccessMeasurements of the Effect of Specimen Size on Young's Modulus and Tensile Strength of Polysilicon
Author(s) -
W. N. Sharpe,
R. Lawrence Edwards,
Katrin Turner
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.9
Subject(s) - materials science , modulus , wafer , ultimate tensile strength , composite material , microelectronics , young's modulus , displacement (psychology) , optoelectronics , psychology , psychotherapist
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