Open AccessThick Single Crystal Si Lateral Resonant Devices Integrated with a Conventional Circuit Process
Author(s) -
J.W. Weigold,
Andrew Wong,
Cong Thanh Nguyen,
S. W. Pang
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.8
Subject(s) - materials science , resonator , fabrication , optoelectronics , integrated circuit , transistor , masking (illustration) , process (computing) , electronic circuit , vibration , electrical engineering , acoustics , engineering , computer science , voltage , physics , operating system , medicine , art , alternative medicine , pathology , visual arts
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