Open AccessThick Single Crystal Si Lateral Resonant Devices Integrated with a Conventional Circuit Process
Author(s) -
J.W. Weigold,
Andrew Wong,
Cong Thanh Nguyen,
Sheng-Liang Pang
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.8
Subject(s) - process (computing) , materials science , optoelectronics , electronic engineering , electrical engineering , computer science , engineering , operating system