Open AccessElectrostatic Domino Actuators
Author(s) -
Guodong Su,
Lei Fan,
Minghao Wu
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.4
Subject(s) - actuator , domino , displacement (psychology) , closing (real estate) , materials science , air gap (plumbing) , surface micromachining , optoelectronics , electrical engineering , engineering , composite material , fabrication , chemistry , biochemistry , catalysis , medicine , psychology , alternative medicine , pathology , political science , law , psychotherapist
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