Open AccessDesign, Finite Element Analysis, and Experimental, Performance Evaluation of a Thermally-Actuated Beam Used to Achieve Large In-Plane Mechanical Deflections
Author(s) -
Peter B. Allen,
Jeffrey T. Howard,
Edward S. Kolesar,
Josh M. Wilken
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.3
Subject(s) - microelectromechanical systems , actuator , finite element method , piezoelectricity , fabrication , voltage , beam (structure) , mechanical engineering , thermal , materials science , position (finance) , acoustics , engineering , structural engineering , electrical engineering , physics , optoelectronics , medicine , alternative medicine , finance , pathology , meteorology , economics
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