Open AccessFabrication of a Micro Turbine/Bearing Rig
Author(s) -
C.D. Lin,
Reza Ghodssi,
Arturo A. Ayón,
D.-Z. Chen,
M.A. Schmidt
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.13
Subject(s) - wafer , fabrication , etching (microfabrication) , materials science , silicon , bearing (navigation) , turbine , ram air turbine , mechanical engineering , wafer fabrication , hydraulic turbines , optoelectronics , nanotechnology , engineering , computer science , medicine , alternative medicine , pathology , artificial intelligence , layer (electronics)
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