Open AccessA Robust Capacitive Pressure Sensor Array
Author(s) -
J.-B. Lee,
S.-P. Chang,
M. Allen
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.10
Subject(s) - kapton , surface micromachining , materials science , electroplating , capacitive sensing , capacitance , fabrication , electrode , optoelectronics , pressure sensor , diaphragm (acoustics) , microelectromechanical systems , substrate (aquarium) , microfabrication , electrical engineering , electronic engineering , nanotechnology , mechanical engineering , engineering , polyimide , medicine , chemistry , alternative medicine , oceanography , layer (electronics) , pathology , geology , loudspeaker
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom