Open AccessA Robust Capacitive Pressure Sensor Array
Author(s) -
J.-B. Lee,
Shih-Chen Chang,
Mark G. Allen
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998a.10
Subject(s) - capacitive sensing , pressure sensor , computer science , acoustics , electronic engineering , electrical engineering , engineering , physics , mechanical engineering