Open AccessIn-Situ Monitoring of Micro-Chemical Vapor Deposition (µ-CVD): Experimental Results and Spice Modeling
Author(s) -
Ronald P. Manginell,
Jason Smith,
Antonio J. Ricco,
R.C. Hughes,
R. Huber,
Daniel Moreno
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.86
Subject(s) - spice , materials science , chemical vapor deposition , deposition (geology) , fabrication , optoelectronics , bridge circuit , heat transfer , equivalent circuit , electronic engineering , voltage , electrical engineering , mechanics , engineering , paleontology , sediment , medicine , alternative medicine , physics , pathology , biology
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