Open AccessIn-Situ Monitoring of Micro-Chemical Vapor Deposition (µ-CVD): Experimental Results and Spice Modeling
Author(s) -
Ron Manginell,
Jason Smith,
A. J. Ricco,
R.C. Hughes,
R. Huber,
Daniel Moreno
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.86
Subject(s) - spice , chemical vapor deposition , in situ , deposition (geology) , materials science , environmental science , nanotechnology , electronic engineering , chemistry , engineering , geology , paleontology , organic chemistry , sediment