Open AccessDesign of an Intergrated Silicon-PDMS Cell Cartridge
Author(s) -
B. Derek DeBusschere,
David A. Borkholder,
G.T.A. Kovacs
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.83
Subject(s) - cartridge , silicon , materials science , optoelectronics , metallurgy