Open AccessDevelopment of Rechargeable Microbatteries for Autonomous MEMS Applications
Author(s) -
L.G. Salmon,
R.A. Barksale,
B.R. Beachem,
Rodney M. LaFollette,
John N. Harb,
Jamelyn Holladay,
P. Humble
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.78
Subject(s) - microelectromechanical systems , fabrication , computer science , electrical engineering , engineering , systems engineering , materials science , nanotechnology , medicine , alternative medicine , pathology
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