Open AccessPulsed-Source Interferometry for Characterization of Resonant Micromachined Structures
Author(s) -
Roman C. Gutierrez,
Kirill Shcheglov,
Tony K. Tang
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.75
Subject(s) - interferometry , characterization (materials science) , surface micromachining , materials science , optoelectronics , computer science , optics , physics , fabrication , medicine , alternative medicine , pathology