Open AccessPulsed-Source Interferometry for Characterization of Resonant Micromachined Structures
Author(s) -
R.C. Gutierrez,
K. Shcheglov,
Tony K. Tang
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.75
Subject(s) - interferometry , optics , resonator , surface micromachining , laser , materials science , signal (programming language) , vibration , excitation , physics , acoustics , computer science , medicine , alternative medicine , pathology , fabrication , quantum mechanics , programming language
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