Open AccessA New Pulsed-Mode Micromachined Flow Sensor for an Integrated Microfluidic System
Author(s) -
Nihat Okulan,
Huang N.-T.,
C.H. Ahn
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.74
Subject(s) - microfluidics , surface micromachining , materials science , fluidics , flow (mathematics) , microelectromechanical systems , nanotechnology , flow sensor , electronic engineering , engineering , aerospace engineering , acoustics , mechanics , fabrication , physics , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom