Open AccessA New Pulsed-Mode Micromachined Flow Sensor for an Integrated Microfluidic System
Author(s) -
Nihat Okulan,
Chang-Hoi Ahn
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.74
Subject(s) - microfluidics , flow sensor , mode (computer interface) , surface micromachining , flow (mathematics) , materials science , optoelectronics , computer science , nanotechnology , acoustics , mechanics , physics , operating system , fabrication , medicine , alternative medicine , pathology