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DRIE-Fabrcated Nozzles for Generating Supersonic Flows in Micropropulsion Systems
Author(s) -
Robert Bayt,
Kenneith Bruer,
Arturo A. Ayón
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.72
Subject(s) - nozzle , mechanics , mach number , supersonic speed , acceleration , reynolds number , materials science , range (aeronautics) , deep reactive ion etching , thrust , discharge coefficient , flow (mathematics) , choked flow , physics , etching (microfabrication) , thermodynamics , classical mechanics , reactive ion etching , composite material , layer (electronics) , turbulence

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