Open AccessHigh Reliability Touch-Mode Electrostatic Actuators (TMEA)
Author(s) -
C. Cabuz,
Eugen Cabuz,
T. Ohnstein,
J. Neus,
Roya Maboudian
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.68
Subject(s) - reliability (semiconductor) , actuator , mode (computer interface) , computer science , electrostatic discharge , electrical engineering , reliability engineering , engineering , human–computer interaction , voltage , physics , artificial intelligence , power (physics) , quantum mechanics