Open AccessHigh Reliability Touch-Mode Electrostatic Actuators (TMEA)
Author(s) -
C. Cabuz,
Eugen Cabuz,
T.R. Ohnstein,
J. Neus,
Roya Maboudian
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.68
Subject(s) - stiction , actuator , reliability (semiconductor) , dielectric , charge (physics) , mode (computer interface) , failure mode and effects analysis , humidity , materials science , computer science , reliability engineering , electrical engineering , engineering , optoelectronics , microelectromechanical systems , physics , power (physics) , meteorology , quantum mechanics , operating system
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