Open Access2x2 MEMS Fiber Optic Switches with Silicon Sub-Mount for Low-Cost Packaging
Author(s) -
S.-S. Lee,
Leelien Ken Huang,
C-J. Kim,
M. C. Wu
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.64
Subject(s) - microelectromechanical systems , mount , silicon , optical fiber , materials science , electronic packaging , optoelectronics , computer science , telecommunications , composite material , operating system