Open Access2x2 MEMS Fiber Optic Switches with Silicon Sub-Mount for Low-Cost Packaging
Author(s) -
S.-S. Lee,
LS Huang,
C-J. Kim,
Ming-Hsien Wu
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.64
Subject(s) - materials science , microelectromechanical systems , surface micromachining , optical switch , optical fiber , silicon , chip , optoelectronics , bulk micromachining , millisecond , electrical engineering , computer science , fabrication , engineering , telecommunications , medicine , alternative medicine , physics , pathology , astronomy
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