Open AccessMagnetically Actuated Micromirrors for Fiber-Optic Switching
Author(s) -
B. Behin,
K.Y. Lau,
R.S. Muller
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.62
Subject(s) - clamping , materials science , optical fiber , fabrication , optoelectronics , electromagnet , substrate (aquarium) , chip , silicon , optics , electrical engineering , engineering , mechanical engineering , magnet , physics , medicine , oceanography , alternative medicine , pathology , geology
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