Open AccessA Wafer-Bonded Silicon-Nitride Membrane Microphone with Dielectrically-Isoloated, Single-Crystal Silicon Piezoresistors
Author(s) -
Mark Sheplak,
Kenneth Breuer,
Martin A. Schmidt
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.6
Subject(s) - materials science , piezoresistive effect , silicon nitride , microphone , wafer , optoelectronics , silicon , fabrication , bandwidth (computing) , electronic engineering , electrical engineering , engineering , telecommunications , loudspeaker , medicine , alternative medicine , pathology
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