Open AccessA Wafer-Bonded Silicon-Nitride Membrane Microphone with Dielectrically-Isoloated, Single-Crystal Silicon Piezoresistors
Author(s) -
Mark Sheplak,
Kenneth S. Breuer,
Martin Schmidt
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.6
Subject(s) - wafer , materials science , silicon nitride , silicon , optoelectronics , hybrid silicon laser , microphone , electrical engineering , engineering , loudspeaker