Open AccessCarbonized Parylene as a Conformal Sacrificial Layer
Author(s) -
Ève Hui,
Caroline Keller,
R.T. Howe
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.58
Subject(s) - layer (electronics) , parylene , materials science , conformal map , conformal coating , computer science , composite material , polymer , coating , mathematical analysis , mathematics