Open AccessCarbonized Parylene as a Conformal Sacrificial Layer
Author(s) -
Ève Hui,
Caroline Keller,
Roger T. Howe
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.58
Subject(s) - materials science , conformal coating , parylene , annealing (glass) , layer (electronics) , carbonization , conformal map , undercut , composite material , carbon fibers , chemical vapor deposition , metallurgy , nanotechnology , coating , polymer , scanning electron microscope , mathematical analysis , mathematics , composite number
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