Open AccessAnodic Sacrificial Layer Etch (Asle) for Large Area and Blind Cavity Release of Metallic Structures
Author(s) -
John C. Selby,
Mark A. Shan
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.57
Subject(s) - materials science , layer (electronics) , anode , etching (microfabrication) , metal , optoelectronics , electrode , composite material , metallurgy , chemistry