Open AccessAnodic Sacrificial Layer Etch (Asle) for Large Area and Blind Cavity Release of Metallic Structures
Author(s) -
John C. Selby,
Mark A. Shan
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.57
Subject(s) - etching (microfabrication) , materials science , layer (electronics) , electroplating , optoelectronics , anode , copper , nickel , composite material , metallurgy , electrode , chemistry
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