Open AccessSelective Copper Plating of Polysilicon Surface Micromachined Structures
Author(s) -
Jia-Wei Yeh,
Chen Jm,
T.D. Kudrle,
H.P. Neves,
Norman C. Tien
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.56
Subject(s) - copper , materials science , surface micromachining , copper plating , plating (geology) , optoelectronics , metallurgy , fabrication , composite material , electroplating , geology , medicine , alternative medicine , pathology , layer (electronics) , geophysics