Open AccessSelective Copper Plating of Polysilicon Surface Micromachined Structures
Author(s) -
J. Andrew Yeh,
Jianmin Chen,
T.D. Kudrle,
Herc P. Neves,
N.C. Tien
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.56
Subject(s) - copper , materials science , copper plating , metallurgy , surface roughness , microelectromechanical systems , surface micromachining , plating (geology) , coating , surface finish , silicon , metal , optoelectronics , composite material , fabrication , layer (electronics) , electroplating , medicine , alternative medicine , pathology , geophysics , geology
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