Open AccessUltra-This P Monocrystalline Silicon Microstructures
Author(s) -
Ching-Chun Huang,
K. Najafi
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.54
Subject(s) - monocrystalline silicon , silicon , materials science , microstructure , optoelectronics , metallurgy