Open AccessUltra-This P Monocrystalline Silicon Microstructures
Author(s) -
Ching-Chun Huang,
K. Najafi
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.54
Subject(s) - materials science , monocrystalline silicon , silicon , microstructure , boron , fabrication , annealing (glass) , wafer , microelectromechanical systems , optoelectronics , composite material , medicine , chemistry , alternative medicine , organic chemistry , pathology
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