Open AccessPost-Packaging Release a New Concept for Surface-Micromachined Devices
Author(s) -
Balaji Sridharan,
C.-J. Kim,
Long-Sun Huang
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.50
Subject(s) - surface micromachining , materials science , computer science , fabrication , medicine , pathology , alternative medicine