Open AccessA Micro Fluxgate Magnetic Sensor Using Micromachined 3-Dimensional Planar Coils
Author(s) -
T.M. Liakopoulos,
Miao Xu,
Ch.H. Ahn
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.5
Subject(s) - fluxgate compass , wafer , planar , materials science , solenoid , photoresist , optoelectronics , electroplating , electrical engineering , magnetic core , ring oscillator , magnetometer , magnetic field , acoustics , engineering , electromagnetic coil , physics , computer science , nanotechnology , cmos , layer (electronics) , computer graphics (images) , quantum mechanics
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