Open AccessA Micro Fluxgate Magnetic Sensor Using Micromachined 3-Dimensional Planar Coils
Author(s) -
T.M. Liakopoulos,
Mingqing Xu,
Ch.H. Ahn
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.5
Subject(s) - fluxgate compass , planar , surface micromachining , materials science , electrical engineering , magnetic noise , acoustics , optoelectronics , magnetometer , nuclear magnetic resonance , magnetic field , engineering , computer science , physics , fabrication , electromagnetic shielding , medicine , computer graphics (images) , alternative medicine , pathology , quantum mechanics