Open AccessFabrication of High-Density Cantilever Arrays and Thorough-Wafer Interconnects
Author(s) -
Eugene M. Chow,
H. Tom Soh,
Aaron Partridge,
J. A,
Thomas W. Kenny,
Shahram Abdollahi-Alibeik,
J.P. McVittie,
Aongus McCarthy,
S.F. Quate
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.49
Subject(s) - wafer , materials science , fabrication , cantilever , etching (microfabrication) , plasma etching , optoelectronics , resist , silicon , plasma , dry etching , deposition (geology) , nanotechnology , composite material , layer (electronics) , medicine , alternative medicine , pathology , paleontology , physics , quantum mechanics , sediment , biology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom