Open AccessMEMS Simulation Using Sugar v0.5
Author(s) -
Jason K. Clark,
Ningning Zhou,
Kristofer S. J. Pister
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.42
Subject(s) - microelectromechanical systems , computer science , sugar , materials science , nanotechnology , chemistry , biochemistry