Open AccessA High-Speed Capacitive Humidity Sensor
Author(s) -
U Kang,
K.D. Wise
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.40
Subject(s) - capacitive sensing , materials science , humidity , dielectric , polyimide , optoelectronics , sensitivity (control systems) , response time , moisture , capacitance , relative humidity , composite material , electrical engineering , electronic engineering , computer science , electrode , engineering , meteorology , chemistry , layer (electronics) , physics , computer graphics (images)
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