Open AccessA High-Speed Capacitive Humidity Sensor
Author(s) -
U Kang,
K.D. Wise
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.40
Subject(s) - capacitive sensing , humidity , computer science , electrical engineering , materials science , engineering , meteorology , physics