Open AccessA Parametric Method for Linking MEMS Package and Device Models
Author(s) -
A. McNeil
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.36
Subject(s) - microelectromechanical systems , parametric statistics , computer science , electronic engineering , engineering , materials science , mathematics , optoelectronics , statistics