Open AccessA Parametric Method for Linking MEMS Package and Device Models
Author(s) -
Andrew McNeil
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.36
Subject(s) - microelectromechanical systems , parametric statistics , computer science , electronic engineering , finite element method , parametric model , package design , engineering , materials science , engineering drawing , structural engineering , optoelectronics , statistics , mathematics
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