Open Access5-Level Polysilicon Surface Micromachine Technology: Application to Complex Mechanical Systems
Author(s) -
M. Steven Rodgers,
J.J. Sniegowski
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.32
Subject(s) - materials science , surface (topology) , microelectromechanical systems , computer science , optoelectronics , mathematics , geometry