Open Access5-Level Polysilicon Surface Micromachine Technology: Application to Complex Mechanical Systems
Author(s) -
M.S. Rodgers,
J.J. Sniegowski
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.32
Subject(s) - fabrication , silicon , robustness (evolution) , materials science , interconnection , reliability (semiconductor) , layer (electronics) , process (computing) , computer science , nanotechnology , electronic engineering , optoelectronics , engineering , chemistry , medicine , computer network , biochemistry , alternative medicine , power (physics) , physics , pathology , quantum mechanics , gene , operating system
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom