Open AccessEelctrostatically Actuated Microswitches: Scaling Properties
Author(s) -
N.E. McGruer,
P.M. Zavracky,
Suman Majumder,
George G. Adams,
Rebecca Morrison
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.30
Subject(s) - scaling , computer science , human–computer interaction , mathematics , geometry