Open AccessEelctrostatically Actuated Microswitches: Scaling Properties
Author(s) -
N.E. McGruer,
P.M. Zavracky,
Suman Majumder,
George G. Adams,
Rebecca Morrison
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.30
Subject(s) - scaling , electrical impedance , materials science , voltage , optoelectronics , electrical engineering , engineering , geometry , mathematics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom