Open AccessHigh Tuning-Ratio MEMS-Based Tunable Capacitors for RF Communications Application
Author(s) -
Jiahui Yao,
S.T. Park,
J.F. DeNatale
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.28
Subject(s) - capacitor , microelectromechanical systems , materials science , radio frequency , electrical engineering , optoelectronics , electronic engineering , computer science , engineering , voltage