Open AccessLeveraged Bending for Full-Gap Positioning with Electrostatic Actuation
Author(s) -
E.S. Hung,
S.D. Senturia
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.19
Subject(s) - actuator , bending , diffraction , position (finance) , electrostatics , grating , range (aeronautics) , diffraction grating , materials science , optics , computer science , mechanical engineering , optoelectronics , electrical engineering , structural engineering , engineering , physics , composite material , finance , quantum mechanics , economics
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