Open AccessLeveraged Bending for Full-Gap Positioning with Electrostatic Actuation
Author(s) -
E.S. Hung,
S.D. Senturia
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.19
Subject(s) - bending , electrostatic discharge , structural engineering , computer science , materials science , electrical engineering , mechanical engineering , engineering , voltage