Open AccessHigh-Aspect-Ratio Rotary Polygon Micromotor Scanners
Author(s) -
A.A. Yasseen,
Joseph N Mitchell,
D.A. Smith,
Mehran Mehregany
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.17
Subject(s) - scanner , materials science , speed wobble , polygon (computer graphics) , optics , rotor (electric) , deep reactive ion etching , microfabrication , fabrication , etching (microfabrication) , beam steering , optoelectronics , beam (structure) , engineering , electrical engineering , physics , reactive ion etching , mechanical engineering , nanotechnology , frame (networking) , medicine , alternative medicine , classical mechanics , layer (electronics) , pathology
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