Open AccessA Study of Microcantilever Quality Factor
Author(s) -
Kevin Yasumura,
T. D. Stowe,
Eunhee Choe,
T. Pfafman,
D. Rugar,
TiffAnnie Kenny
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.15
Subject(s) - cantilever , dissipation , materials science , microelectromechanical systems , silicon nitride , silicon , mechanical energy , annealing (glass) , q factor , optoelectronics , nanotechnology , composite material , physics , quantum mechanics , power (physics) , resonator , thermodynamics
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