Open AccessA Study of Microcantilever Quality Factor
Author(s) -
K. Yasumura,
T. D. Stowe,
Eunhee Choe,
T. Pfafman,
D. Rugar,
Hing Man Chan
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.15
Subject(s) - quality (philosophy) , computer science , factor (programming language) , materials science , physics , quantum mechanics , programming language