Open AccessA High Performance Planar Piezoresistive Accelerometer
Author(s) -
Aaron Partridge,
J. K,
Benjamin W. Chui,
Eugene M. Chow,
Alissa Fitzgerald,
L. Zhang,
S.R. Cooper,
N.I. Maluf,
Tom Kenny
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.14
Subject(s) - piezoresistive effect , accelerometer , planar , flexibility (engineering) , fabrication , materials science , etching (microfabrication) , electronic engineering , computer science , electrical engineering , nanotechnology , optoelectronics , engineering , operating system , medicine , statistics , computer graphics (images) , mathematics , alternative medicine , pathology , layer (electronics)
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