Open AccessA High Performance Planar Piezoresistive Accelerometer
Author(s) -
Aaron Partridge,
Benjamin W. Chui,
Eugene M. Chow,
Alissa Fitzgerald,
L. Zhang,
S.R. Cooper,
N.I. Maluf,
Tom Kenny
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.14
Subject(s) - accelerometer , piezoresistive effect , planar , computer science , materials science , electrical engineering , optoelectronics , engineering , operating system