Open AccessMultiple Depth, Single Crystal Silicon MicroActuators for Large Displacement Fabricated by Deep Reactive Ion Etching
Author(s) -
C.S-B. Lee,
Sang Eon Han,
Nick MacDonald
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.11
Subject(s) - deep reactive ion etching , materials science , comb drive , actuator , fabrication , etching (microfabrication) , silicon , liga , reactive ion etching , displacement (psychology) , spring (device) , optoelectronics , optics , trimming , composite material , electrical engineering , mechanical engineering , engineering , physics , psychology , layer (electronics) , psychotherapist , medicine , alternative medicine , pathology
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