Open AccessMultiple Depth, Single Crystal Silicon MicroActuators for Large Displacement Fabricated by Deep Reactive Ion Etching
Author(s) -
C.S-B. Lee,
Sang Eon Han,
Nick MacDonald
Publication year - 1998
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1998.11
Subject(s) - silicon , etching (microfabrication) , materials science , deep reactive ion etching , reactive ion etching , optoelectronics , ion , displacement (psychology) , crystal (programming language) , nanotechnology , computer science , chemistry , psychology , layer (electronics) , psychotherapist , organic chemistry , programming language